Wafer post-process appearance detection device

The invention discloses a wafer post-process appearance detection device which comprises a feeding bin mechanism used for stacking and placing carrying discs filled with wafers to be detected, a discharging bin mechanism used for stacking and placing carrying discs with detected wafers, and a feedin...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	MO WUQIANG, FENG WENCAN, ZHANG HUA
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	CONVEYING HANDLING THIN OR FILAMENTARY MATERIAL INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING PACKING PERFORMING OPERATIONS PHYSICS PNEUMATIC TUBE CONVEYORS SHOP CONVEYOR SYSTEMS STORING TESTING TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING ORTIPPING TRANSPORTING
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