Three-dimensional shape measurement device, reference surface position adjustment method for three-dimensional shape measurement device, and measurement mode switching method for three-dimensional shape measurement device
The first purpose of the present invention is to provide a three-dimensional shape measurement device and a reference surface position adjustment method for the three-dimensional shape measurement device, whereby a measurement optical path length and a reference optical path length can be aligned wi...
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| Format: | Patent |
| Sprache: | chi ; eng |
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| Zusammenfassung: | The first purpose of the present invention is to provide a three-dimensional shape measurement device and a reference surface position adjustment method for the three-dimensional shape measurement device, whereby a measurement optical path length and a reference optical path length can be aligned with each other with high accuracy at low cost regardless of the installation environment temperature. A second purpose of the present invention is to provide a three-dimensional shape measurement device capable of switching between three-dimensional shape measurement of a surface to be measured by a WLI method and three-dimensional shape measurement of a surface to be measured by an FV method, and a measurement mode switching method for the three-dimensional shape measurement device. In order to achieve a first purpose, the present invention is provided with: a holder (24) that changes the length of a reference optical path in accordance with a temperature change; and a temperature adjustment unit (26) that adjusts |
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