Polycrystalline diamond film growth device and method

The invention relates to the technical field of chemical vapor deposition equipment, in particular to a polycrystalline diamond film growing device and method.The growing device comprises a vapor deposition cabinet and a control cabinet for controlling the vapor deposition cabinet, and the control c...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: DANG WENLI, ZHANG ZENGXIONG, MA JUNRAN, JIANG MINGQUAN
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The invention relates to the technical field of chemical vapor deposition equipment, in particular to a polycrystalline diamond film growing device and method.The growing device comprises a vapor deposition cabinet and a control cabinet for controlling the vapor deposition cabinet, and the control cabinet is electrically connected with the vapor deposition cabinet; the vapor deposition cabinet is internally provided with a separable deposition cavity fixed in the vapor deposition cabinet; the lifting assembly is in threaded connection with the deposition cavity and is used for separating or sealing the deposition cavity; the support table is rotationally arranged in the deposition cavity and is used for placing a substrate to be grown; according to the vapor deposition cabinet, the rotating mechanism is arranged in the vapor deposition cabinet, so that the technical problem that a substrate material is heated unevenly is solved. Specifically, the design of the support table and the rotating mechanism ensures