Method and apparatus for radio frequency mesh design in ESC for reducing film asymmetry

Method and apparatus for radio frequency mesh design in ESC for reducing film asymmetry

An electrostatic chuck (ESC) apparatus and method are provided. The ESC may have one or more chuck electrodes and a blocking electrode surrounding the chuck electrodes. The blocking electrode may reduce non-uniformity in semiconductor processing operations performed using the ESC. In some implementa...

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Bibliographische Detailangaben
Hauptverfasser: MAMUNURU, MEENAKSHI, SOLAB, ASHISH, FRENCH DAVID, VAHIDI MUHAMMAD, TOPPING STEPHEN, YUKINORI, SAKIYAMA, THOMAS TIMOTHY SCOTT, SUBRAMONIAM, PRAMOD, CHANDRASEKHARAN, RAMESH, BREILING PATRICK G, BELOSTOTSKIY SERGEY GEORGIEVICH, BAKER NOAH ELLIOT
Format: Patent
Sprache:chi ; eng
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:An electrostatic chuck (ESC) apparatus and method are provided. The ESC may have one or more chuck electrodes and a blocking electrode surrounding the chuck electrodes. The blocking electrode may reduce non-uniformity in semiconductor processing operations performed using the ESC. In some implementations, the blocking electrode is located below the chuck electrode. 提供静电卡盘(ESC)装置和方法。ESC可具有一或更多个卡盘电极以及围绕卡盘电极的阻断电极。阻断电极可减少使用ESC执行的半导体处理操作中的不均匀性。在某些实现方案中，阻断电极位于卡盘电极下方。