Reaction chamber pressure intensity control system

The invention provides a reaction chamber pressure control system, and relates to the technical field of automatic control, and the system comprises a data collection module which is used for obtaining real-time pressure data in a reaction chamber through preset monitoring equipment; the preprocessi...

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Bibliographische Detailangaben
Hauptverfasser: LIU XIANGLIN, CUI CAOXIANG, LI CHENGMING, GUO BAIJUN, ZHU RUIPING, YANG SHAOYAN, SHI CHAO, CHEN ZHAOXIAN
Format: Patent
Sprache:chi ; eng
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Zusammenfassung:The invention provides a reaction chamber pressure control system, and relates to the technical field of automatic control, and the system comprises a data collection module which is used for obtaining real-time pressure data in a reaction chamber through preset monitoring equipment; the preprocessing module is used for preprocessing the real-time pressure data to obtain data to be analyzed; the data analysis module is used for acquiring corresponding expected target data from a pressure database, and performing comparative analysis on the expected target data and the to-be-analyzed data to obtain pressure comparison data; and the pressure intensity control module is used for generating a corresponding pressure intensity control instruction based on the pressure intensity comparison data and controlling operation parameters of corresponding pressure control equipment until the pressure intensity comparison data meets a first threshold value condition. The control precision of the system on the pressure intens