Manufacturing method of probe card converter

Manufacturing method of probe card converter

The invention provides a manufacturing method of a probe card converter and a probe card, and the method comprises the following steps: S1) providing two layers of ceramic substrates, including a first ceramic substrate and a second ceramic substrate, and respectively processing the two layers of ce...

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Hauptverfasser: SHAO YU, YU HAICHAO, HOU KEYU
Format: Patent
Sprache:chi ; eng
Schlagworte:
MEASURING
MEASURING ELECTRIC VARIABLES
MEASURING MAGNETIC VARIABLES
PHYSICS
TESTING
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creator SHAO YU
YU HAICHAO
HOU KEYU
description The invention provides a manufacturing method of a probe card converter and a probe card, and the method comprises the following steps: S1) providing two layers of ceramic substrates, including a first ceramic substrate and a second ceramic substrate, and respectively processing the two layers of ceramic substrates to form semi-finished products; s2) respectively sputtering seed layers on the combined surfaces of the first ceramic substrate and the second ceramic substrate, photoetching and developing; s3) respectively electroplating conductive metal on the combined surfaces of the first ceramic substrate and the second ceramic substrate, and then respectively removing photoresist and corroding the seed layer to form a metal welding pad; s4) respectively covering polymers on the bonding surfaces of the first ceramic substrate and the second ceramic substrate; s5) removing the polymer on the conductive metal of the first ceramic substrate and the conductive metal of the second ceramic substrate by adopting a C
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subjects MEASURING
MEASURING ELECTRIC VARIABLES
MEASURING MAGNETIC VARIABLES
PHYSICS
TESTING
title Manufacturing method of probe card converter
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