Particle beam microscope

A particle beam microscope (1) includes a particle beam source (3), an objective lens (7), a first scintillator (51), a second scintillator (53), and photodetectors (55, 57). A first beam path of light generated by the first scintillator (51) and a second beam path of light generated by the second scintillator (53) overlap each other. The scintillator body of the first scintillator (51) generates light (83) having a first spectral distribution, and the second scintillator (53) generates light having a second spectral distribution different from the first spectral distribution. 一种粒子束显微镜(1)包括粒子束源(3)、物镜(7)、第一闪烁体(51)、第二闪烁体(53)以及光检测器(55、57)。由第一闪烁体(51)产生的光的第一束路径和由第二闪烁体(53)产生的光的第二束路径彼此重叠。第一闪烁体(51)的闪烁体本体产生具有第一光谱分布的光(83)，并且第二闪烁体(53)产生具有与该第一光谱分布不同的第二光谱分布的光。