Metallographic detection method for rapidly testing grain size of ITO target material and application of metallographic detection method

The invention provides a metallographic detection method for rapidly testing the grain size of an ITO target material and application of the metallographic detection method, and belongs to the technical field of detection. According to the method, the ITO target material is ground through coarse gri...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: LIN ZUYI, HUANG XIAOLIN, LUO YUNXIA, CHEN SHENGSHENG, SONG XIFENG, HAYASHI TOMONARI, LI QIANG
Format: Patent
Sprache:chi ; eng
Schlagworte:
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
Beschreibung
Zusammenfassung:The invention provides a metallographic detection method for rapidly testing the grain size of an ITO target material and application of the metallographic detection method, and belongs to the technical field of detection. According to the method, the ITO target material is ground through coarse grinding, fine grinding and polishing, the smooth surface can be obtained, the phosphoric acid solution is adopted as the acid corrosion agent, the grain structure of the ITO target material can be shown, and damage to the ITO target material cannot be caused; corrosion is carried out at a relatively high temperature, so that the corrosion rate can be increased; by controlling the corrosion time, grains can be completely displayed, the boundary is clear, a grain boundary image can be clearly and quickly captured under a metallographic microscope, the grain granularity of the ITO target material can be further quickly measured, the cost is low, low-cost detection on the grain granularity of the non-high-purity metal ta