Aluminum nitride electrostatic chuck and preparation method thereof

The invention relates to an aluminum nitride electrostatic chuck, an aluminum nitride electrostatic chuck with ceramic layers with different functions and a preparation method of the aluminum nitride electrostatic chuck. According to the aluminum nitride electrostatic chuck, the forming process of three-layer step-by-step hydraulic pressure, cold isostatic pressing and integrated sintering is adopted, good flatness and parallelism are achieved, and then the uniformity of the electrostatic adsorption force or the temperature control performance of the electrostatic chuck is improved. The aluminum nitride electrostatic chuck with the ceramic layers with different functions comprises a first ceramic layer, an electrostatic electrode, a second ceramic layer, a heating electrode and a third ceramic layer, the electrostatic electrode is located between the first ceramic layer and the second ceramic layer, and the heating electrode is located between the second ceramic layer and the third ceramic layer; the componen