Electronic-grade hydrofluoric acid filling equipment

The invention discloses an electronic-grade hydrofluoric acid filling device which comprises a roller conveyor, a hydrofluoric acid filling device, a hydrofluoric acid filling device, a hydrofluoric acid filling device and a hydrofluoric acid filling device. The filling isolation mechanism comprises...

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Bibliographische Detailangaben
Hauptverfasser: ZOU ZHENNI, LIU SHUIXING, SHI LINGBIN, FENG QIAO, TANG RONGPING
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The invention discloses an electronic-grade hydrofluoric acid filling device which comprises a roller conveyor, a hydrofluoric acid filling device, a hydrofluoric acid filling device, a hydrofluoric acid filling device and a hydrofluoric acid filling device. The filling isolation mechanism comprises an isolation cover fixedly connected to the piston rod end of the lifting air cylinder, one side of the isolation cover is fixedly connected with a filling pipe, and the other side of the isolation cover is fixedly connected with an exhaust pipe; the loading mechanism comprises a loading barrel, a corresponding feeding pipe is upwards arranged at the top of the loading barrel, guide pipes are obliquely installed on the two sides of the middle of the feeding pipe respectively, a feeding guide pipe and an exhaust guide pipe which correspond to each other are movably inserted into the guide pipes respectively, a pipe cover is installed on the feeding pipe, and the exhaust guide pipe is movably inserted into the pipe