Information processing apparatus, substrate processing apparatus, information processing method, and storage medium

The invention provides an information processing apparatus, a substrate processing apparatus, an information processing method, and a storage medium capable of appropriately creating a substrate processing schedule. An information processing apparatus creates a substrate processing schedule when a p...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: ICHINOSE SHO, NAKAMURA TAKAMASA, OTAKI HIROSHI
Format: Patent
Sprache:chi ; eng
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Zusammenfassung:The invention provides an information processing apparatus, a substrate processing apparatus, an information processing method, and a storage medium capable of appropriately creating a substrate processing schedule. An information processing apparatus creates a substrate processing schedule when a predetermined number of substrates are sequentially processed in a substrate processing apparatus. The information processing apparatus includes: a substrate processing time acquisition unit that acquires a polishing time and a finishing time based on recipe information; a transport processing time acquisition unit that acquires a transport time; and a schedule creation unit that creates, as mathematically optimized restriction conditions, a process order condition, a simultaneous process condition, and a transfer process priority condition that prescribes the transfer process before the polishing process to be prioritized with respect to the transfer process after the polishing process. Then, a substrate processing