MEMS piezoelectric resonator

The embodiment of the invention discloses an MEMS (Micro Electro Mechanical System) piezoelectric resonator. The MEMS piezoelectric resonator comprises a substrate and a device layer, wherein the substrate is provided with a first cavity; the device layer is arranged on the substrate and comprises a coupling structure, an energy transfer structure, a connecting rod, at least one pair of anchor points and at least one pair of resonance bodies, the resonance bodies are connected with the coupling structure through the energy transfer structure, the anchor points are connected with the coupling structure through the connecting rod, and each pair of anchor points are symmetrically arranged relative to the coupling structure; each pair of resonators is symmetrically arranged about the coupling structure, and the coupling structure is of a hollow annular structure. According to the scheme, the Q value of the MEMS piezoelectric resonator can be improved. 本申请实施例公开了一种MEMS压电谐振器，该MEMS压电谐振器包括衬底和器件层。其中，衬底具有第一空腔；器件层设置于衬底上，