Package device and method of forming same

The invention relates to a packaging device and a forming method thereof. A process includes depositing an edge fill dielectric over a first workpiece and a device disposed thereon. The edge fill dielectric is patterned such that only the edge portion remains. A second dielectric material is formed...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: CAI RUIXUAN, HUANG CHUQUAN, ZHANG QIAOJUN, YANG SUCHUN, TU JICHENG, LIU CHUNG-XI
Format: Patent
Sprache:chi ; eng
Schlagworte:
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