High-sensitivity capacitive flexible pressure sensor and preparation method thereof

The invention belongs to the technical field of flexible sensing, and particularly relates to a high-sensitivity capacitive flexible pressure sensor and a preparation method thereof.The high-sensitivity capacitive flexible pressure sensor comprises a substrate layer containing a first high polymer m...

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Bibliographische Detailangaben
Hauptverfasser: WANG SHUN, XIAO YUQING, LI WEI, QIN RUZHAN, SHA TAO
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The invention belongs to the technical field of flexible sensing, and particularly relates to a high-sensitivity capacitive flexible pressure sensor and a preparation method thereof.The high-sensitivity capacitive flexible pressure sensor comprises a substrate layer containing a first high polymer material and an interdigital electrode layer connected to the substrate layer in a bonding mode, and the interdigital electrode layer is made of a metal material; the upper part of the interdigital electrode layer is a sensitive layer, the sensitive layer comprises a composite film formed by MXene and a second high polymer material, and the outermost side of the capacitive flexible pressure sensor is a packaging layer. Compared with the prior art, the flexible pressure sensor has the problems that the preparation process is complicated and the miniaturization and integration of the flexible pressure sensor are not facilitated due to the fact that a microstructure is introduced into a dielectric layer or an electrode