Diagnostic tool-to-tool matching method and comparative drill down analysis method for manufacturing equipment

A method includes receiving first data associated with measurements made by a sensor during a first manufacturing procedure of a manufacturing chamber. The method also includes receiving second data. The second data includes reference data associated with the first data. The method also includes pro...

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Bibliographische Detailangaben

Hauptverfasser:	HONG JEONG-JIN, LEE JIN-KYUNG, SEE JUN-JEON, SHEN MEIJING, KIM SANG-HONG, ZOU XIAOQUN
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CONTROL OR REGULATING SYSTEMS IN GENERAL CONTROLLING ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY FUNCTIONAL ELEMENTS OF SUCH SYSTEMS MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS ORELEMENTS PHYSICS REGULATING SEMICONDUCTOR DEVICES
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