Diagnostic tool-to-tool matching method and comparative drill down analysis method for manufacturing equipment

A method includes receiving first data associated with measurements made by a sensor during a first manufacturing procedure of a manufacturing chamber. The method also includes receiving second data. The second data includes reference data associated with the first data. The method also includes providing the first and second data to a comparison model. The method also includes receiving a similarity score associated with the first and second data from the comparison model. The method also includes performing a correction action in view of the similarity score. 一种方法包括接收与传感器在制造腔室的第一制造程序期间进行的测量相关联的第一数据。此方法还包括接收第二数据。此第二数据包括与此第一数据相关联的参考数据。此方法还包括将此第一及第二数据提供给比较模型。此方法还包括自此比较模型接收与此第一及第二数据相关联的相似性分数。此方法还包括鉴于此相似性分数进行校正动作。