Pressure sensor, manufacturing method thereof and pressure detection device

The invention discloses an MEMS pressure sensor and a manufacturing method thereof, and a pressure detection device. The MEMS pressure sensor comprises an adapter plate; the integrated circuit chip is arranged on one side of the adapter plate; the sensor chip is arranged on one side, deviating from the integrated circuit chip, of the adapter plate; the sensor chip comprises a first electrode and a second electrode, and the first electrode is arranged between the adapter plate and the second electrode; wherein the second electrode comprises a pressure sensing part opposite to the first electrode and an edge part surrounding the pressure sensing part, the edge part is fixed on the adapter plate through a bonding layer, and a cavity is defined by the first electrode, the second electrode, the bonding layer and the adapter plate; the first electrode and the second electrode of the sensor chip are electrically connected with the integrated circuit chip through the adapter plate. 一种MEMS压力传感器及其制作方法、压力检测装置，MEMS压力传感器包