Dispersion liquid of hollow silica particles and method for producing same

Provided are: a dispersion liquid of hollow silica particles having a small particle diameter, a low refractive index, and high dispersibility in a dispersion medium or a resin; and a method for producing the dispersion liquid. The particles are hollow silica particles having an outer shell containing silicon and a cavity inside the outer shell. The thickness of the outer shell is 3 nm to 7 nm, the average particle diameter of the particles is 20 nm to 55 nm, the refractive index of the particles is 1.12 to 1.35, and the number density of silanol groups on the surface of the particles, calculated according to the Sears measurement method, is 0.5/nm < 2 > to 2.5/nm < 2 >. When a dispersion containing the particles is used in a resist material, high developability is achieved when a pattern is formed. 提供一种粒径小、折射率低、在分散介质中或树脂中的分散性高的中空二氧化硅粒子的分散液及其制造方法。该粒子是中空二氧化硅粒子，所述中空二氧化硅粒子具有：包含硅的外壳、及其内侧的空洞。所述外壳的厚度为3nm～7nm，所述粒子的平均粒径为20nm～55nm，所述粒子的折射率为1.12～1.35，所述粒子的根据Sears测定法计算出的粒子表面的硅烷醇基的数密度为0.5个/nm2～2.5个/nm2。在将包含该粒子的分散液用于抗蚀剂材料