Organic electroluminescent material air duct evaporation chip process

The invention provides an organic electroluminescent material air channel evaporation chip technology, and relates to the technical field of semiconductor processing, and the technology comprises the following steps: spraying supersonic gas through a Laval nozzle; micro-jet colloid is sprayed out through the colloid input pipeline; the supersonic gas and the micro-jet colloid pass through the mixing spray pipe to realize gas-liquid two-phase flow mixing; the mixed material is sprayed to the surface of the OLED chip through the spray head, the micro-jet colloid is uniformly distributed on the surface of the OLED chip after being evaporated by gas, the mixing effect of the colloid and supersonic gas can be improved after the colloid is subjected to micro-jet, the heat exchange effect of the micro-jet colloid is better than that of the colloid, and the problem that when the mixing effect of the colloid and the gas is poor, the mixing effect of the micro-jet colloid and the supersonic gas is poor is solved. The u