Three-dimensional reconstruction equipment and method based on photometric stereo method under microscope
The invention discloses three-dimensional reconstruction equipment and method based on a photometric stereo method under a microscope, is used for reconstructing a three-dimensional structure of a microscopic object, is particularly suitable for detecting whether scratches and manufacturing defects...
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| creator | KONG LINGQIN ZHAO YUEJIN DONG LIQUAN LYU CHENGWEI LIU MING CHU XUHONG PENG YONG |
| description | The invention discloses three-dimensional reconstruction equipment and method based on a photometric stereo method under a microscope, is used for reconstructing a three-dimensional structure of a microscopic object, is particularly suitable for detecting whether scratches and manufacturing defects exist on the surface of a chip or not, belongs to the technical field of three-dimensional reconstruction, and particularly relates to the technical field of photometric stereo application methods. In order to solve the problem of lack of chip three-dimensional detection equipment convenient to operate at present, a metallographic microscope is transformed, so that three-dimensional reconstruction is carried out on the structure of a chip by using a photometric stereo method. The core idea of the method is that a three-dimensional structure is obtained by transforming a light source of a metallographic microscope, collecting 3-9 chip appearance images under different illumination conditions, performing normal graph |
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In order to solve the problem of lack of chip three-dimensional detection equipment convenient to operate at present, a metallographic microscope is transformed, so that three-dimensional reconstruction is carried out on the structure of a chip by using a photometric stereo method. 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In order to solve the problem of lack of chip three-dimensional detection equipment convenient to operate at present, a metallographic microscope is transformed, so that three-dimensional reconstruction is carried out on the structure of a chip by using a photometric stereo method. The core idea of the method is that a three-dimensional structure is obtained by transforming a light source of a metallographic microscope, collecting 3-9 chip appearance images under different illumination conditions, performing normal graph</abstract><oa>free_for_read</oa></addata></record> |
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| subjects | CALCULATING COMPUTER SYSTEMS BASED ON SPECIFIC COMPUTATIONAL MODELS COMPUTING COUNTING IMAGE DATA PROCESSING OR GENERATION, IN GENERAL INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS OPTICS PHYSICS TESTING |
| title | Three-dimensional reconstruction equipment and method based on photometric stereo method under microscope |
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