Surface roughness detection device and method of ceramic nozzle for etching equipment

The invention discloses a device and a method for detecting the surface roughness of a ceramic nozzle for etching equipment, and aims to overcome the defects that batch detection is difficult and the stability, synchronism and correctness of the roughness detection of the ceramic nozzle cannot be ensured in the conventional method for detecting the roughness of the ceramic nozzle. The device comprises a rotary table, wherein a plurality of positioning jigs are arranged on the rotary table; the manipulator grabs the ceramic nozzle and transfers the ceramic nozzle to the positioning jig; the plurality of positioning jigs realize the installation of the ceramic nozzle at a plurality of angle positions; and the roughness detector is used for detecting the roughness of the ceramic nozzles on the plurality of positioning jigs at a plurality of angle positions. According to the technical scheme, high-efficiency and high-qualified-rate batch detection of the surface roughness of the ceramic nozzles is achieved, manua