Projection lens, projection exposure device, and projection exposure method

A refractive projection lens (PO) images a pattern arranged in an object plane (OS) of the projection lens into an image plane (IS) of the projection lens by means of electromagnetic radiation having an operating wavelength in the ultraviolet range exceeding 280 nm, said refractive projection lens comprising a plurality of lens elements arranged along an optical axis (OA) between the object plane (OS) and the image plane (IS), a diaphragm plane (BE) is adapted to attach an aperture diaphragm (AS), the diaphragm plane being located between the object plane and the image plane, in which diaphragm plane the main ray of imaging intersects the optical axis (OA), and is designed in such a way that a pattern arranged in the object plane can be imaged into the image plane by means of the lens element. The projection lens is designed as a large-field lens having an object field radius of at least 52 mm, and has a structure with an imaging ratio of 1: 1 and mirror symmetry with respect to a diaphragm plane (BE). 一种折射投射