Wafer focal plane database acquisition method and device, storage medium and terminal

The invention discloses a wafer focal plane database obtaining method and device, a storage medium and a terminal, and the method comprises the steps: obtaining wafer image data when a wafer is located at a plurality of image obtaining heights, and calculating the image feature value of each image m...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	HAN JINGSHAN, LI JUANXIU
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	CALCULATING COMPUTING COUNTING IMAGE DATA PROCESSING OR GENERATION, IN GENERAL PHYSICS
Online-Zugang:	Volltext bestellen
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