Wafer focal plane database acquisition method and device, storage medium and terminal

The invention discloses a wafer focal plane database obtaining method and device, a storage medium and a terminal, and the method comprises the steps: obtaining wafer image data when a wafer is located at a plurality of image obtaining heights, and calculating the image feature value of each image module; taking all image modules corresponding to the same module position of the measured wafer in all wafer image data as an image module group for measuring the corresponding module position of the wafer; based on the image acquisition heights and the image feature values corresponding to all the image modules in each image module group, the optimal focal plane height of the corresponding module position in the measured wafer in each image module group is acquired; and forming a wafer focal plane database based on the measured positions of all modules in the wafer and the optimal focal plane height of each module position. The method can achieve the purpose of real-time focusing when scanning other wafers in the