Electronic emitting source, electronic emitting module and method for manufacturing electronic emitting source

An electron-emitting source includes a substrate (11) and a coating film. The substrate is made of a material containing a metal serving as a growth nucleus for nanotube fibers as a main component, and has a plurality of through holes (13). The coating film (12) is constituted by nanotube fibers for...

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Bibliographische Detailangaben
Hauptverfasser: NAGAMEGURI TAKESHI, YOTANI SUMIKO, UEMURA SASHIRO
Format: Patent
Sprache:eng
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Zusammenfassung:An electron-emitting source includes a substrate (11) and a coating film. The substrate is made of a material containing a metal serving as a growth nucleus for nanotube fibers as a main component, and has a plurality of through holes (13). The coating film (12) is constituted by nanotube fibers formed on a surface of the substrate and wall surfaces (14) of the through holes (13). A method of manufacturing an electron-emitting source is also disclosed.