Resonant micro vibrating mirror

The invention relates to the technical field of micro-galvanometers, in particular to a resonant micro-galvanometer which comprises a micro-mirror and further comprises a first driving coil, a slow shaft, a second driving coil, a limiting frame, a fast shaft, an outer frame, a bottom limiting assemb...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	BAO HANG, REN JUNDA, ZHU BINHUA
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	CLADDING OR PLATING BY SOLDERING OR WELDING CONVERSION OR DISTRIBUTION OF ELECTRIC POWER CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING DYNAMO-ELECTRIC MACHINES ELECTRICITY GENERATION MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS OPTICS PERFORMING OPERATIONS PHYSICS SOLDERING OR UNSOLDERING TRANSPORTING WELDING WORKING BY LASER BEAM
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