Resonant micro vibrating mirror
The invention relates to the technical field of micro-galvanometers, in particular to a resonant micro-galvanometer which comprises a micro-mirror and further comprises a first driving coil, a slow shaft, a second driving coil, a limiting frame, a fast shaft, an outer frame, a bottom limiting assemb...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | The invention relates to the technical field of micro-galvanometers, in particular to a resonant micro-galvanometer which comprises a micro-mirror and further comprises a first driving coil, a slow shaft, a second driving coil, a limiting frame, a fast shaft, an outer frame, a bottom limiting assembly and a shaft end limiting assembly. The slow shafts are symmetrically installed on the periphery of the first driving coil, the second driving coil is arranged on the outer side of the micromirror, the shaft end limiting assemblies are installed between the ends of the slow shafts and the inner wall of the second driving coil, the shaft end limiting assemblies limit the rotation angles of the slow shafts, and the limiting frame is installed on the periphery of the second driving coil in an attached mode. When the micro-mirror swings beyond the set deflection angle, the micro-mirror can be prevented from continuously swinging in time in a limiting mode, the micro-galvanometer is prevented from being damaged, the p |
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