Method and device for measuring flatness of bearing platform and storage medium

The invention discloses a bearing platform flatness measuring method and device and a storage medium, and the method comprises the steps: obtaining the sample image data of a to-be-measured sample on a bearing platform when the bearing platform is located at a reference height and a plurality of ima...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: HAN JINGSHAN, LI JUANXIU
Format: Patent
Sprache:chi ; eng
Schlagworte:
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