Method and device for measuring flatness of bearing platform and storage medium

The invention discloses a bearing platform flatness measuring method and device and a storage medium, and the method comprises the steps: obtaining the sample image data of a to-be-measured sample on a bearing platform when the bearing platform is located at a reference height and a plurality of ima...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: HAN JINGSHAN, LI JUANXIU
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The invention discloses a bearing platform flatness measuring method and device and a storage medium, and the method comprises the steps: obtaining the sample image data of a to-be-measured sample on a bearing platform when the bearing platform is located at a reference height and a plurality of image obtaining heights, and calculating the image contrast of each image module; comparing the image contrast of all image modules corresponding to the same module position in the to-be-detected sample in all sample image data to obtain the optimal focal plane height of each module position in the to-be-detected sample; and the optimal focal plane height of each module position of the to-be-measured sample is subtracted from the reference height to obtain the focal length height difference corresponding to each module position, and the flatness of the bearing platform is judged based on the focal length height differences corresponding to all module positions. According to the invention, the surface flatness of the b