High-precision chip non-contact pickup device based on rotational flow pickup

The invention belongs to the field of chip pickup, and particularly discloses a high-precision chip non-contact pickup device based on rotational flow pickup, which comprises a rack main body, a test platform, a rotational flow pickup head, a horizontal displacement adjusting mechanism, a leveling m...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: ZHAI PEIRAN, XIE BIN, WU HAO, YIN ZHOUPING
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The invention belongs to the field of chip pickup, and particularly discloses a high-precision chip non-contact pickup device based on rotational flow pickup, which comprises a rack main body, a test platform, a rotational flow pickup head, a horizontal displacement adjusting mechanism, a leveling mechanism and a sensing measurement mechanism, the test platform is horizontally mounted on the rack main body through the horizontal displacement adjusting mechanism and can move in the horizontal direction; the leveling mechanism comprises a first manual Z shaft and a three-shaft adjusting frame, the three-shaft adjusting frame is installed on the machine frame body through the first manual Z shaft and can move in the vertical direction, the rotational flow pickup head is installed on the three-shaft adjusting frame to achieve leveling, and the rotational flow pickup head is located above the testing platform. Through multi-module integrated arrangement, the pickup head design, debugging and performance testing ba