Semiconductor device and preparation method thereof, and electronic equipment

The invention discloses a semiconductor device and a preparation method thereof, and electronic equipment, the semiconductor device comprises a substrate, a channel layer stack part, a surrounding type grid electrode, a source-drain function part and a first side wall, the channel layer stack part i...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	SANG GUANQIAO, JIANG RENJIE, WANG PENG, YIN HUAXIANG, CAO LEI, ZHANG QINGZHU, LI QINGKUN
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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