Preparation method of silicon-based liquid crystal device, silicon-based liquid crystal device and display device

The invention relates to a preparation method of a silicon-based liquid crystal device, the silicon-based liquid crystal device and a display device. The preparation method comprises the following steps: providing a bottom plate; a plurality of pixel electrodes are formed on the surface of the bottom plate, and a gap is formed between every two adjacent pixel electrodes; forming a planarized first protection layer on the gap and the surface of each pixel electrode, wherein the gap is filled with the first protection layer; and forming a second protection layer on the surface of the first protection layer. The surface of the pixel electrode is filled with the first protective layer, the first protective layer is flattened, and the second protective layer is deposited to protect the first protective layer, so that etching removal and secondary deposition of the first protective layer are omitted on the basis of ensuring the flatness and the reflective rate of the surface of the silicon-based liquid crystal devi