MEMS piezoelectric resonator

The MEMS piezoelectric resonator comprises a substrate and a device layer, the device layer comprises a first supporting beam, a first electrode layer, a first piezoelectric layer, a second electrode layer and a frequency adjusting area, the first supporting beam is arranged on the substrate, a first cavity is formed between the first supporting beam and the substrate, the first electrode layer is arranged in the first cavity, and the second electrode layer is arranged in the second cavity. The first electrode layer, the first piezoelectric layer and the second electrode layer are sequentially arranged on the side, back on to the substrate, of the first supporting beam in a stacked mode, the first electrode layer, the first piezoelectric layer and the second electrode layer are close to the anchoring end of the first supporting beam, and the frequency adjusting area comprises a first frequency adjusting layer and a second frequency adjusting layer. The frequency adjustment region is proximate a free end of th