Probe card adapter plate and manufacturing method thereof, and probe card

The invention provides a probe card adapter plate and a manufacturing method thereof and a probe card, the probe card adapter plate comprises a ceramic substrate with a first surface and a second surface which are opposite, the first surface of the ceramic substrate is provided with a first adding layer, the first adding layer is provided with a first liner array, the second surface of the ceramic substrate is provided with a second adding layer, and the second adding layer is provided with a second liner array. A first liner array is arranged on the first adding layer, a second liner array is arranged on the second adding layer, the liner spacing a of the first liner array is smaller than the liner spacing c of the second liner array, a plurality of straight through holes are formed in the ceramic substrate, internal wires are uniformly distributed in the first adding layer and the second adding layer, and the plurality of straight through holes are respectively filled with metal wires. The two ends of each