Cleaning equipment for integrated circuit substrate

The invention discloses cleaning equipment for an integrated circuit substrate. The cleaning equipment comprises a workbench and a substrate body, the workbench is connected with a mounting seat, the mounting seat is connected with a plurality of magnetic suction seats used for fixing a substrate bo...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: SHEN FANGCHEN, ZHANG YONGQIANG
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The invention discloses cleaning equipment for an integrated circuit substrate. The cleaning equipment comprises a workbench and a substrate body, the workbench is connected with a mounting seat, the mounting seat is connected with a plurality of magnetic suction seats used for fixing a substrate body, and the substrate body is detachably connected with an adsorption assembly; the adsorption assembly comprises an upper seat body, a lower seat body, an upper permanent magnet block and a lower permanent magnet block; a mounting partition plate is connected to the upper portion of the workbench. A dust brushing device and a dust suction device are mounted on the mounting partition plate; the dust collection device comprises a dust collection pipeline and a dust collection fan; the dust brushing device comprises a brush and a control mechanism; and the lower part of the dust collection pipeline is connected with a dust collection nozzle. In the installation of the substrate body, the upper seat body and the lower