DEFECT DETECTION DEVICE AND DEFECT DETECTION METHOD

This defect detection device is provided with: an illuminator that irradiates light on the surface of an object to be inspected; a two-dimensional camera that has an optical axis in the normal direction of the surface of the object to be inspected, and generates a plurality of captured images having...

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Bibliographische Detailangaben
Hauptverfasser: OTA YOSHIYUKI, NAKATA TAKEO, NAKANO RYUSUKE
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:This defect detection device is provided with: an illuminator that irradiates light on the surface of an object to be inspected; a two-dimensional camera that has an optical axis in the normal direction of the surface of the object to be inspected, and generates a plurality of captured images having a two-dimensional region defined by a first axis in a direction corresponding to the direction of movement of the surface of the object to be inspected and a second axis in a direction corresponding to a direction orthogonal to the optical axis and the first axis; and a defect detector that detects a defect on the surface of the object to be inspected on the basis of the captured image. The defect detector executes the following processes: setting a plurality of access regions in each captured image, the plurality of access regions being disposed at different positions in the direction of the first axis and each extending in the direction of the second axis (# 5); generating a plurality of linked images (# 10) cor