Laser beam shaping device and method and laser peak annealing method

A laser beam shaping device and method, and a laser peak annealing method, the laser beam shaping device comprising: a conical lens, a laser beam from the outside being incident from a columnar portion and exiting from a conical portion, the conical lens being suitable for converting the laser beam...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: XIE ZHENZHEN, TAN RONGQING, WANG GUOCHANG, HU LIEMAO, KE CHANGJUN, LEE JIYOUNG, WANG ZIMING, ZHENG YIJUN
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:A laser beam shaping device and method, and a laser peak annealing method, the laser beam shaping device comprising: a conical lens, a laser beam from the outside being incident from a columnar portion and exiting from a conical portion, the conical lens being suitable for converting the laser beam into an annular beam, the annular beam having an annular light spot, the laser beam being a collimated Gaussian beam, and the collimated Gaussian beam being used for receiving the collimated Gaussian beam; the incidence direction of the laser beam is perpendicular to the bottom surface of the columnar part; the cylindrical mirror is suitable for focusing the annular light beam in the first direction so that the annular light beam can be converted into a linear light beam, and the section of the linear light beam is in linear distribution; the diaphragm is positioned between the cylindrical mirror and the focal plane of the cylindrical mirror and is suitable for filtering the linear light beam; the filtered linear l