Voltage sampling circuit, device and method

The invention relates to the technical field of matchers, in particular to a voltage sampling circuit, device and method, the circuit is applied to a radio frequency matcher, and the voltage sampling circuit comprises a sampling probe and a voltage processing module; wherein a preset sampling distance is arranged between the sampling probe and a sampling point of the radio frequency matcher, the sampling probe is further connected with the voltage processing module, and the voltage processing module is connected with external equipment; the sampling probe is used for sensing a high-frequency high-voltage signal output by the radio frequency matcher through the electrical gap and outputting the high-frequency high-voltage signal to the voltage processing module; and the voltage processing module is used for processing the high-frequency high-voltage signal to obtain a voltage value of a sampling point of the radio frequency matcher and outputting the voltage value to external equipment. According to the invent