Double-end reflection laser interference measuring device
The invention provides a double-end reflection laser interference measuring device, which comprises an acquisition module, an emergent and incident module and an interference module, and is characterized in that the first emergent end of the emergent and incident module is aligned with the incident...
Gespeichert in:
Hauptverfasser: | , , |
---|---|
Format: | Patent |
Sprache: | chi ; eng |
Schlagworte: | |
Online-Zugang: | Volltext bestellen |
Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
Zusammenfassung: | The invention provides a double-end reflection laser interference measuring device, which comprises an acquisition module, an emergent and incident module and an interference module, and is characterized in that the first emergent end of the emergent and incident module is aligned with the incident end of the interference module, and the second emergent end of the emergent and incident module is aligned with the incident end of the acquisition module; the first emergent end of the emergent and incident module is the incident end of the emergent and incident module relative to the interference module, and the incident end of the interference module is the emergent end of the interference module relative to the emergent and incident module; wherein the interference module comprises a reference light path and a measuring light path, the reference light path and the measuring light path have a common section of shared sub-light path, the reference light path is formed by aligning the head and tail ends of the sha |
---|