Magneto-sensitive element and preparation method thereof, magneto-sensitive sensor, electronic device, chip and electronic equipment

The invention relates to the technical field of magnetic sensing, in particular to a magneto-sensitive element, a preparation method of the magneto-sensitive element, a magneto-sensitive sensor, an electronic device, a chip and electronic equipment. The magneto-sensitive element comprises a substrat...

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Bibliographische Detailangaben
Hauptverfasser: LIU ZIWEI, LI TENGHAO, WANG HAO, WANG MANRONG, SUN HENGCHAO, JIANG SHUAI, LI PEIXIAO, ZHOU XIANZI, JI RUNKE, ZANG ZHICHENG, TAO YI, DU JUN, FANG DONGMING
Format: Patent
Sprache:chi ; eng
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Zusammenfassung:The invention relates to the technical field of magnetic sensing, in particular to a magneto-sensitive element, a preparation method of the magneto-sensitive element, a magneto-sensitive sensor, an electronic device, a chip and electronic equipment. The magneto-sensitive element comprises a substrate, an active region, an excitation electrode and a magnetic deflection current detection electrode, the substrate is located at the bottommost layer; the active region is formed on the substrate; the active region is of a comb-shaped structure, the comb-shaped structure comprises a comb ridge and a plurality of comb teeth, and the plurality of comb teeth extend out from one side or multiple sides of the comb ridge; the excitation electrode is arranged on the comb ridge or at the periphery of the comb ridge, is in electric contact with the comb ridge, is connected with an external power supply through a wire, and is used for applying excitation current to the magneto-sensitive element; the magnetic deflection curren