Inflation flow control device for vacuum chamber

The invention discloses a vacuum chamber inflation flow control device which comprises a data acquisition module, a thermal mass flowmeter, a speed reducer, an end deviation analysis module, a pipe length analysis module, a temperature deviation analysis module, a flow correction unit and a control...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	AHN GEON-HO, ZHU JIUJU, ZHAO JIANGUANG, LIU NIANSHENG, XU BANGHONG, TANG HUANHUAN
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	CONTROLLING PHYSICS REGULATING SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
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