Inflation flow control device for vacuum chamber

The invention discloses a vacuum chamber inflation flow control device which comprises a data acquisition module, a thermal mass flowmeter, a speed reducer, an end deviation analysis module, a pipe length analysis module, a temperature deviation analysis module, a flow correction unit and a control mechanism mounted on an inflation pipeline, the control mechanism is driven by the speed reducer to control the inflation flow, the rotating speed and the running time of the speed reducer are controlled by the flow correction unit, the flow numerical value closer to the real gas flow can be calculated, workers can conveniently know the actual flow in the inflation pipeline, and therefore the inflation flow is controlled according to the actual flow, and the working efficiency is improved. And the flow stability and accuracy in the vacuum chamber can be improved conveniently. 本发明公开了一种真空室充气流量控制装置，包括数据采集模块、热式质量流量计、减速机，所述热式质量流量计固定安装在充气管道上，还包括端偏分析模块、管长分析模块、温偏分析模块、流量修正单元以及安装在充气管道上的控制机构，所述控制机构由减速机驱动控制充气流量，所述减速机转速与运行时间由流量