Three-dimensional Hall sensor and measuring method of space magnetic field vector
The invention provides a three-dimensional Hall sensor and a measuring method of a space magnetic field vector, the three-dimensional Hall sensor comprises a first Hall effect element, a second Hall effect element and a magnetic conductive component, the first Hall effect element and the second Hall...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | The invention provides a three-dimensional Hall sensor and a measuring method of a space magnetic field vector, the three-dimensional Hall sensor comprises a first Hall effect element, a second Hall effect element and a magnetic conductive component, the first Hall effect element and the second Hall effect element are stacked on a substrate and are used for sensing a magnetic field vector along the orthogonal direction of the surface of the substrate, the magnetic conductive part is located on the first Hall effect element and the second Hall effect element and used for deflecting magnetic field components parallel to the surface of the substrate and exporting magnetic field signals in the orthogonal direction of the magnetic field components, and the two Hall effect elements work independently. According to the invention, the two Hall effect elements are positioned relative to the same substrate in a partially overlapped manner, so that the positioning precision and the assembly stability of the functional e |
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