Intelligent dosing system and method for semiconductor chemical mechanical polishing wastewater treatment

The invention relates to the technical field of wastewater treatment, and particularly discloses an intelligent dosing system and method for semiconductor chemical mechanical polishing wastewater treatment, and the system comprises a water inlet collection part, a dosing part, a data collection part...

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Bibliographische Detailangaben
Hauptverfasser: ZHANG JIANQING, DU YONGXUN, WEI XUJIE, HAO FENGBO, WEI BOHUI, CHEN SHUANG
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The invention relates to the technical field of wastewater treatment, and particularly discloses an intelligent dosing system and method for semiconductor chemical mechanical polishing wastewater treatment, and the system comprises a water inlet collection part, a dosing part, a data collection part, an intelligent control part and a water outlet part. The dosing part comprises a pH adjusting tank, a reaction tank, a flocculation tank, a coagulation tank and a dosing module. The data collection part comprises an alumen ustum image collection module, a pH collection module, an SS concentration analysis module and a sedimentation tank; the alumen ustum image collection module, the pH collection module and the SS concentration analysis module are respectively connected with the sedimentation tank; the intelligent control part is further connected with an intelligent learning system, multi-level abstract representation of data is learned through a plurality of neural network levels, the system has the advantages