Novel coating tool for specific base material in crystalline silicon industry
The invention discloses a novel coating tool for a specific base material in the crystalline silicon industry, the novel coating tool comprises a fixing frame, a motor mounting bottom plate and a tool top plate, the tool top plate and the motor mounting bottom plate are respectively mounted on the u...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | The invention discloses a novel coating tool for a specific base material in the crystalline silicon industry, the novel coating tool comprises a fixing frame, a motor mounting bottom plate and a tool top plate, the tool top plate and the motor mounting bottom plate are respectively mounted on the upper surface and the lower surface of the fixing frame, a lifting motor is fixed on the motor mounting bottom plate through screws, and a screw rod is arranged at the output end of the lifting motor; the outer wall of the threaded sleeve is fixedly connected with a supporting plate, a tool middle substrate is fixed to the supporting plate through screws, a liquid leakage preventing baffle is fixed to the periphery of the lower surface of the tool middle substrate through screws, a solution collecting tray is fixed to the inner wall of the fixing frame through screws, and a substrate groove is formed in the tool top plate. According to the invention, the compatibility is higher, and the process requirement of high-p |
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