Laser apparatus, optical path adjustment method, and method for manufacturing electronic device
A laser device according to one aspect of the present disclosure is provided with: an oscillator that emits laser light; an amplifier that amplifies the laser light in a cavity including the pair of discharge electrodes; a front-side optical system and a rear-side optical system, which are disposed...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | A laser device according to one aspect of the present disclosure is provided with: an oscillator that emits laser light; an amplifier that amplifies the laser light in a cavity including the pair of discharge electrodes; a front-side optical system and a rear-side optical system, which are disposed at positions facing each other with the cavity therebetween, and which constitute a ring resonator including a first optical path and a second optical path that intersect between the pair of discharge electrodes; a front observation device for observing a first optical path and a second optical path between the front optical system and the cavity; and a rear observation device for observing the first optical path and the second optical path between the rear optical system and the cavity. The first optical path is an optical path in which the front-side optical system emits the laser light incident from the oscillator toward the rear-side optical system. The second optical path is an optical path in which the rear-s |
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