Probe card
The purpose of the present invention is to provide a probe card in which contact failure is difficult to occur. Furthermore, the purpose of the present invention is to provide a probe card having good high-frequency characteristics, good current resistance characteristics, and good conductivity. The...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | The purpose of the present invention is to provide a probe card in which contact failure is difficult to occur. Furthermore, the purpose of the present invention is to provide a probe card having good high-frequency characteristics, good current resistance characteristics, and good conductivity. The present invention is provided with: a wiring substrate (10) on which one or more probe electrodes (102) are formed; an upper guide plate (13) which is separated from the wiring substrate (10) to the lower side, is arranged opposite to the wiring substrate (10), and is provided with one or more upper guide holes (131); a lower guide plate (14) which is separated from the upper guide plate (13) to the lower side, is arranged opposite to the upper guide plate (13), and is provided with one or more lower guide holes (141); and a probe group (15G) comprising two or more probes (15) that are inserted through the same upper guide hole (131) and the same lower guide hole (141), and that are connected to the same probe ele |
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