Mask table of photoetching machine

The invention relates to the technical field of photoetching machines, in particular to a mask table of a photoetching machine. The device comprises a photoetching machine fixedly mounted at the top of a machine fixing plate, a bottom plate is arranged below the bottom of the machine fixing plate, a mask box is arranged between the machine fixing plate and the bottom plate, the mask box comprises a wafer fixing box and three push boxes, the three push boxes are arranged in the wafer fixing box in a triangular form, and the wafer fixing box is arranged in the mask box. The internal structures of the three push boxes are the same; a complete wafer fixing state is formed through three-direction contact of the soft rubber clamping arms and position fixing of one side of a silicon wafer by the placing plate, the edges of the silicon wafer are pushed and fixed through the three soft rubber clamping arms so as to be adaptive to the silicon wafers with different sizes, the working end of the photoetching machine is c