Micro-tube flow sensor and micro-flow detection method

The invention belongs to the technical field of intelligent sensing, and particularly relates to a micro-tube flow sensor and a micro-flow detection method. The microtube flow sensor comprises a resistive film base provided with a microflow pipeline; the flow detection module is arranged on the resi...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: CHEN XINZHUN, ZHU RUI, ZHANG BIN, CHENG YUANHONG, CHEN SHANREN
Format: Patent
Sprache:chi ; eng
Schlagworte:
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
Beschreibung
Zusammenfassung:The invention belongs to the technical field of intelligent sensing, and particularly relates to a micro-tube flow sensor and a micro-flow detection method. The microtube flow sensor comprises a resistive film base provided with a microflow pipeline; the flow detection module is arranged on the resistive film base, and the flow detection module is located on an extension path of the micro-flow pipeline and used for detecting the flow of fluid in the micro-flow pipeline; wherein the micro-flow pipeline is sunken in the end part of the resistive film base, so that a cantilever beam is formed at the end part of the resistive film base, and the flow detection module is embedded in the cantilever beam. According to the invention, the micro-flow pipeline is integrated on the resistive film base, the fluid to be detected is not in direct contact with the flow detection module, but after the micro-flow pipeline is in contact with the cantilever beam, the fluid to be detected flowing in the micro-flow pipeline transfe