Method for checking carrier transport system, vacuum processing device, computer program and computer-readable storage medium

There is provided a method of inspecting a carrier transport system, the carrier transport system comprising: a drive unit for transporting a carrier through a vacuum processing device along a transport path; and a suspension magnet for magnetically holding at least a first portion of the weight of...

Ausführliche Beschreibung

Bibliographische Detailangaben

1. Verfasser:	EHMANN CHRISTIAN WOLFGANG
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CONVEYING ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY HANDLING THIN OR FILAMENTARY MATERIAL PACKING PERFORMING OPERATIONS PNEUMATIC TUBE CONVEYORS SEMICONDUCTOR DEVICES SHOP CONVEYOR SYSTEMS STORING TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING ORTIPPING TRANSPORTING
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